JPH0217555U - - Google Patents
Info
- Publication number
- JPH0217555U JPH0217555U JP9663688U JP9663688U JPH0217555U JP H0217555 U JPH0217555 U JP H0217555U JP 9663688 U JP9663688 U JP 9663688U JP 9663688 U JP9663688 U JP 9663688U JP H0217555 U JPH0217555 U JP H0217555U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- heater
- plasma cvd
- cvd apparatus
- cathode electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 4
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims 2
- 238000006243 chemical reaction Methods 0.000 claims 1
- 230000005684 electric field Effects 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 239000000376 reactant Substances 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9663688U JPH0217555U (en]) | 1988-07-21 | 1988-07-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9663688U JPH0217555U (en]) | 1988-07-21 | 1988-07-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0217555U true JPH0217555U (en]) | 1990-02-05 |
Family
ID=31321672
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9663688U Pending JPH0217555U (en]) | 1988-07-21 | 1988-07-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0217555U (en]) |
-
1988
- 1988-07-21 JP JP9663688U patent/JPH0217555U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0217555U (en]) | ||
| JPH0469465U (en]) | ||
| JPH062952B2 (ja) | プラズマｃｖｄ装置及びプラズマｃｖｄによる成膜方法 | |
| JPS62107439U (en]) | ||
| JPS6426374U (en]) | ||
| JPS6138913Y2 (en]) | ||
| JPS63187326U (en]) | ||
| JPS60179033U (ja) | 放電電極 | |
| JPH0610675Y2 (ja) | プラズマ処理装置 | |
| JPS63159755U (en]) | ||
| JPH02113333U (en]) | ||
| JPS61164024U (en]) | ||
| JPH0160528U (en]) | ||
| JPH02102722U (en]) | ||
| JPS60169257U (ja) | プラズマｃｖｄ装置 | |
| JPS6346465U (en]) | ||
| JPH0415832U (en]) | ||
| JPS6351436U (en]) | ||
| JPH0242427U (en]) | ||
| JPS61203544U (en]) | ||
| JPS6228875U (en]) | ||
| JPS62147335U (en]) | ||
| JPS63187327U (en]) | ||
| JPH03122284A (ja) | プラズマｃｖｄ装置 | |
| JPS6185144U (en]) |